精準(zhǔn)的氣體流量控制系統(tǒng)：
滿足復(fù)雜工藝對(duì)氣體配比和流量的精密控制要求。
優(yōu)化的產(chǎn)能與可靠性：
設(shè)計(jì)旨在提升設(shè)備運(yùn)行效率（UPH）和長(zhǎng)期運(yùn)行的穩(wěn)定性，為客戶降低綜合擁有成本。
山東力冠負(fù)責(zé)人表示，“它不僅僅是一款新產(chǎn)品，更是我們解決半導(dǎo)體制造關(guān)鍵設(shè)備‘卡脖子’難題的決心體現(xiàn)。我們將持續(xù)加大研發(fā)投入，深耕核心技術(shù)，致力于為國(guó)內(nèi)晶圓制造廠提供性能卓越、穩(wěn)定可靠且更具競(jìng)爭(zhēng)力的國(guó)產(chǎn)高端裝備，為中國(guó)半導(dǎo)體產(chǎn)業(yè)的自主可控與升級(jí)發(fā)展貢獻(xiàn)‘力冠’力量。”
該設(shè)備的成功研發(fā)與推出，不僅豐富了山東力冠在半導(dǎo)體前道設(shè)備領(lǐng)域的產(chǎn)品線，顯著提升了公司在高端市場(chǎng)的競(jìng)爭(zhēng)實(shí)力，更直接響應(yīng)了當(dāng)前國(guó)內(nèi)半導(dǎo)體產(chǎn)業(yè)鏈對(duì)設(shè)備本土化的迫切需求。據(jù)悉，該設(shè)備即將進(jìn)入國(guó)內(nèi)主流芯片制造產(chǎn)線進(jìn)行客戶驗(yàn)證。
Localization Milestone Achieved! Shandong Liguan Launches Self-Developed 12-Inch Vertical Furnace.
July 31, 2025 – Shandong Liguan Microelectronics Equipment Co., Ltd. (hereinafter referred to as "Shandong Liguan") officially announces the successful market launch of its first independently developed 12-inch (300mm) vertical furnace, marking a significant breakthrough in high-end semiconductor thermal processing equipment. This achievement underscores the Company’s commitment to advancing localized alternatives for core semiconductor manufacturing equipment through innovation and technological prowess.
The 12-inch vertical furnace is designed for advanced IC manufacturing, addressing critical high-temperature processes such as thin-film deposition, oxidation, and annealing with stringent performance requirements. After 1,000+ days of R&D and 10,000+ hours of rigorous testing, the system demonstrates notable improvements in key specifications:
Superior Temperature Uniformity & Stability:
Ensures wafer-to-wafer (WTW) and within-wafer (WIW) process uniformity.
Precision Gas Delivery System:
Enables accurate gas mixing ratios and flow control for complex processes.
Enhanced Productivity & Reliability:
Optimized for high UPH and MTBF, reducing total cost of ownership (TCO).
A Company representative emphasized, "This is more than a new product—it represents our resolve to chokehold technologies in semiconductor equipment. We will continue to increase R&D investment, deepen core technological expertise, and provide domestic wafer fabs with high-performance, reliable, and competitive localized high-end solutions, contributing 'Liguan's strength' to China’s semiconductor self-sufficiency and industrial advancement."
The successful development and launch of this equipment not only expands Shandong Liguan’s product portfolio in front-end semiconductor equipment but also significantly strengthens its competitiveness in the high-end market. More importantly, it directly addresses the urgent need for equipment localization in China’s semiconductor supply chain. It is reported that the tool will soon enter customer validation in mainstream domestic chip production lines.
